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半導(dǎo)體行業(yè)發(fā)展迅速，技術(shù)的不斷更新迭代，使得摩爾定律可以繼續(xù)延續(xù)。技術(shù)研發(fā)在半導(dǎo)體行業(yè)具有重要意義，通過不斷改進(jìn)半導(dǎo)體材料、工藝和器件設(shè)計(jì)，可以提高芯片的性能，如速度、功耗、集成度等，從而推動(dòng)整個(gè)電子產(chǎn)品的發(fā)展。
在技術(shù)研發(fā)階段，需要進(jìn)行大量電性參數(shù)測(cè)試，以此來(lái)反應(yīng)器件、工藝是否符合要求。廣立微測(cè)試設(shè)備測(cè)試效率高、精度高，適用于各類應(yīng)用場(chǎng)景，包括SPICE模型測(cè)試、可尋址測(cè)試和可靠性測(cè)試等，為半導(dǎo)體行業(yè)的技術(shù)研發(fā)提供了可靠支持。
| TD Tester | T4000 (48/100 pin)* |
| Standard Resources | HR_SMU+HS_SMU (18~36) |
| Pulse generator (2/4) | |
| Signal analyzer (2) | |
| Switch matrix | |
| LCR Meter (1/2) | |
| Number of measurement pins | 48/100 |
| Voltage Coverage | ±200 V |
| Current Coverage | ±1 A |
| Voltage measure sensitivity | 100 nV |
| Current measure sensitivity | 0.1fA |
| Voltage measure accuracy | 100uV |
| Current measurement accuracy | 0.1 pA |
| Maximum SMU sample rate | 1.8M samples/sec |
| Capacitance measurement accuracy | 10 fF |
| RO Frequency Coverage | ~ 20MHZ |
| Measurement Functions | DC Current / DC Voltage / Kelvin / Capacitance / Inductance AC Current / AC Voltage / Differential Voltage / Frequency Arbitrary Waveform / Clock Generation / Synchronization (triggering mode) / C-V scan |
Typical Supported Test Items |
Addressable (Transistor Array/ Yield Array/Ring Oscillator Array/CBCM/QVCM/DenseArray/HDYS ID/VT/VTGM/IOFF/ISUB/BV/CAP//ICP |
| BETA/VBE/BVCEO/BVCBO/BVEBO | |
| R2/RKLV/LK/CAP_METAL | |
| IREAD/ISTANDBY/IDDQ/WM/SNM | |
| ERASE/PROGRAM | |
| IDDA/IDDQ/FREQ | |
| IV/CV | |
| Mean time between failures (MTBF) | > 1000 hours |
| Mean time to repair (MTTR) | < 6 hours |
| Uptime rate | ~ 97% |
# Can select based on user needs
* Both T4000 and T4100S can support WLR test if upgrading software
This table shows recommend testers at different application, if you have other requirements, please contact us.
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